Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods
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United States of America Patent
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Sep 13, 2016
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app pub date -
Sep 26, 2014
filing date -
Sep 30, 2013
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Abstract
Transfer chamber gas purge apparatus are disclosed. The transfer chamber gas purge apparatus has a transfer chamber adapted to contain at least a portion of a transfer robot, the transfer chamber including side walls, a chamber lid, and a chamber floor, wherein the chamber lid has a plurality of distributed chamber inlets. The plurality of distributed chamber inlets may include diffusing elements. Laminar purge gas flow may be provided above the substrate. Systems and methods including a plurality of distributed chamber inlets are disclosed, as are numerous other aspects.
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