Methods for integrating lead and graphene growth and devices formed therefrom
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United States of America Patent
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Sep 6, 2016
Grant Date -
Dec 10, 2015
app pub date -
Jan 10, 2014
filing date -
Jan 11, 2013
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Abstract
Methods for forming integrated graphite-based structures with interconnections between leads and graphene layers are provided. A substrate is patterned to form a plurality of elements on the substrate. A trench separates a first element from an adjacent element in the plurality of elements. A lead is deposited on a side wall of the first element, and a layer from the top of the first element is removed to expose a portion of the lead. Both the deposition of the lead and removal of a layer from the top of the first element are conducted before generation of graphene layers on the top of the first element and the bottom of the trench. Thus, an integrated graphite-based structure having spatially isolated but electrically connected graphene layers is formed.
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