Apparatus for manufacturing ingot
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United States of America Patent
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Sep 6, 2016
Grant Date -
Sep 17, 2015
app pub date -
Apr 21, 2014
filing date -
Mar 11, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed is an ingot manufacturing apparatus that includes: a chamber; a crucible which is disposed within the chamber and has a melting zone where silicon particles are melted; an inner wall which is disposed within the crucible and has a growth zone where an ingot grows from molten silicon introduced from the melting zone; a feeding part which supplies the silicon particles and sweeping gas to the inside of the chamber; and a suction part which surrounds the feeding part and discharges the sweeping gas supplied through the feeding part to the outside of the chamber.
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