Radical reactor with inverted orientation
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United States of America Patent
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Sep 6, 2016
Grant Date -
May 7, 2015
app pub date -
Apr 29, 2013
filing date -
May 4, 2012
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Abstract
A radical reactor including an elongated structure received within a chamber of a body of the radical reactor. Radicals are generated within a radical chamber formed in the elongated structure by applying a voltage signal across the elongated structure and an electrode extending within the radical chamber. The radicals generated in the radical chamber are routed via a discharge port of the elongated structure and a conduit formed in the body of the radical reactor onto the substrate. The discharge port and the conduit are not aligned so that irradiation generated in the radical chamber is not directed to the substrate.
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