Temperature compensated resonator with a pair of spaced apart internal dielectric layers
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United States of America Patent
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Aug 30, 2016
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N/A
app pub date -
Nov 1, 2011
filing date -
Sep 26, 2011
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Abstract
A device includes a substrate, an electrode supported by the substrate, an anchor supported by the substrate, and a composite structure supported by the anchor, disposed adjacent the electrode, and configured for resonant vibration. The composite structure includes an external layer and an internal dielectric region covered by the external layer.
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