Defect inspection method
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United States of America Patent
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Aug 30, 2016
Grant Date -
Dec 25, 2014
app pub date -
Jun 18, 2014
filing date -
Jun 19, 2013
priority date (Note) -
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Abstract
There is provided a defect inspection method capable of detecting a crack with high accuracy. The defect inspection method includes the steps of: obtaining a shot image comprising pixels; and scanning the shot image in predetermined directions, and assigning a high evaluation value to a pixel M for each scanning direction when the luminance of the pixel M is lower than the luminances of first adjacent pixels K, O, located on both sides of the pixel M in the scanning direction and, in addition, the luminance of each of second adjacent pixels C, W, located on both sides of the pixel M in a direction perpendicular to the scanning direction, is lower than the luminances of third adjacent pixels A, E or U, Y located on both sides of the second adjacent pixel in the scanning direction. The method also includes the steps of selecting selection pixels based on the evaluation values of the pixels for each scanning direction; connecting the selection pixels for each scanning direction; and synthesizing the selection pixels of the predetermined scanning directions, and removing those pixels which do not meet the requirement for a predetermined shape from the selection pixels.
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