Electron beam drawing apparatus, electron beam drawing method, and storage medium
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United States of America Patent
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Aug 30, 2016
Grant Date -
Jun 25, 2015
app pub date -
Dec 6, 2013
filing date -
Apr 11, 2013
priority date (Note) -
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Abstract
An electron beam drawing apparatus includes: an accepting unit that accepts input graphic information, which is information representing at least one graphic; a graphic width acquiring unit that acquires a width of each of the at least one graphic represented by the input graphic information; a generating unit that generates approximate graphic information representing at least one approximate graphic, which is a graphic configured by at least one rectangle matching the width of the graphic, and is a graphic that approximates each of the at least one graphic represented by the input graphic information; and a drawing unit that draws the at least one approximate graphic represented by the approximate graphic information generated by the generating unit.
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