Manufacturing a flexible structure by transfers of layers
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United States of America Patent
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Aug 30, 2016
Grant Date -
Jun 20, 2013
app pub date -
Dec 18, 2012
filing date -
Dec 20, 2011
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Abstract
A method for manufacturing a flexible structure including implanting ionic species in first and second source substrates so as to form first and second embrittlement regions respectively, delimiting first and second thin films, providing a flexible substrate, the stiffness R of which is less than or equal to 107 GPa·μm3, securing the first and second thin films to the first and second faces of the flexible substrate respectively so as to form a stack including the flexible structure delimited by the first and second embrittlement regions, the flexible structure having a stiffening effect suitable for allowing transfers of the first and second thin films, and applying a thermal budget so as to transfer the first and second thin films onto the flexible substrate.
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