Method of introducing a structure in a substrate

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United States of America Patent

PATENT NO 9427885
SERIAL NO

13132436

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Abstract

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This invention relates to methods for the production of micro-structured substrates and their application in natural sciences and technology, in particular in semiconductor, microfluidic and analysis devices. It concerns a method of introducing a structure, such as a hole or cavity or channel or well or recess or a structural change by providing a controlled electrical discharge.

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Patent Owner(s)

Patent OwnerAddress
AGC INCCHIYODA-KU TOKYO 100-8405

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dittmann, Leander Lausanne, CH 22 38
Schmidt, Christian Le Bouveret, CH 142 944
Stura, Enrico Grandvaux, CH 75 104

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