System and method of determining effective glow discharge lamp current
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United States of America Patent
Stats
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Aug 23, 2016
Grant Date -
Mar 6, 2014
app pub date -
Aug 28, 2013
filing date -
Aug 28, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The embodiments of the invention include a method for controlling plasma conditions of a glow discharge system using the integrated electron (or ion) pulse area extracted from the total lamp current. The method of using an integrated electron/ion pulse area for controlling plasma conditions allows for controlled analysis of conductive, non-conductive and layered materials without the need for estimation of plasma voltages. The method allows for control of sputter rates and plasma emissions that cannot be achieved using other methods such as capacitive divider calculations where actual thicknesses and dielectric constants are not known or predefined.
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International Classification(s)
- 2013 Application Filing Year
- H05H Class
- 283 Applications Filed
- 256 Patents Issued To-Date
- 90.46 % Issued To-Date
Cited Art Landscape
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- 0 Citation Count
- H05H Class
- 0 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 23, 2028 |
