Composition for forming resist protection film for lithography and method for forming pattern of semiconductor device using the same
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United States of America Patent
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Aug 23, 2016
Grant Date -
Jan 7, 2016
app pub date -
Sep 11, 2015
filing date -
Mar 11, 2013
priority date (Note) -
In Force
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Abstract
Provided are a composition for forming a resist protection film for lithography and a method for forming a pattern of a semiconductor device using the same. The composition comprises a repeat unit having a fluorine-containing functional group on a side chain thereof and contains a polymer having a weight average molecular weight of 2,000-100,000 and a solvent. The solvent containing 10-100 parts by weight of a material has a Hildebrand solubility parameter of 12.5-22.0, based on 100 parts by weight of the total weight thereof.
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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DONGJIN SEMICHEM CO LTD | INCHON SOUTH KOREA INCHEON |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Han, Man Ho | Gyeonggi-do, KR | 11 | 17 |
# of filed Patents : 11 Total Citations : 17 | |||
Kim, Hyun Jin | Gyeonggi-do, KR | 272 | 4698 |
# of filed Patents : 272 Total Citations : 4698 | |||
Kim, Jae Hyun | Seoul, KR | 259 | 2059 |
# of filed Patents : 259 Total Citations : 2059 | |||
Park, Jong Kyoung | Gyeonggi-do, KR | 5 | 20 |
# of filed Patents : 5 Total Citations : 20 |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 23, 2028 |
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Legal Events
Date | Code | Event | Description |
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Nov 01, 2006 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Oct 04, 2006 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Oct 04, 2006 |
Oct 04, 2006 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Apr 19, 2006 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Mar 14, 2002 | FPAY | FEE PAYMENT | year of fee payment: 8 |
Mar 06, 1998 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Dec 07, 1996 | FEPP | FEE PAYMENT PROCEDURE | free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
Oct 04, 1994 | I | Issuance | |
Mar 29, 1993 | F | Filing | |
Aug 10, 1990 | PD | Priority Date |

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