Pressure sensor, method for manufacture thereof, and pressure detection module

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United States of America Patent

PATENT NO 9423309
APP PUB NO 20140150571A1
SERIAL NO

14123126

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pressure sensor comprising: a base film on which a conductor pattern having one or more electrodes is formed; a cover film laminated on the base film so as to cover the electrodes of the conductor pattern; and a spacer disposed between the cover film and the base film so as to form a hollow portion having a predetermined gap between the electrode and the cover film; wherein a portion corresponding to the hollow portion of the cover film is constructed such that it has a pressure sensing part which is able to deform in a direction to move toward and away from the electrode in accordance with pressure, and of which contact resistance changes in accordance with a contact pressure thereof with the electrode, so that the pressure sensing part detects the pressure by a change of the contact resistance.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYJAPAN'S TOKYO KASUMIGASEKI CHIYODA A CHOME 3 TIMES 1 TOKYO TOKYO METROPOLIS
THE UNIVERSITY OF TOKYOTOKYO JAPAN TOKYO METROPOLIS
NIPPON MEKTRON LTD1-12-15 SHIBA-DAIMON MINATO-KU TOKYO 105-8585

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iizuka, Katsuyoshi Tokyo, JP 1 21
Kimura, Taisuke Tokyo, JP 10 108
Kuniyoshi, Yasuo Tokyo, JP 8 92
Nagakubo, Akihiko Tsukuba, JP 3 56
Nakajima, Masatoshi Tokyo, JP 31 119
Noguchi, Masayuki Tokyo, JP 30 215
Ohmura, Yoshiyuki Tokyo, JP 5 126
Ohsawa, Takashige Tokyo, JP 1 21
Ozaki, Kazuyuki Tokyo, JP 66 404
Sagisaka, Takashi Tokyo, JP 11 48

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