Method and apparatus for wavefront sensing
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United States of America Patent
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Aug 23, 2016
Grant Date -
Oct 22, 2015
app pub date -
Dec 31, 2014
filing date -
Jan 3, 2014
priority date (Note) -
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Abstract
A method of measuring characteristics of a wavefront of an incident beam includes obtaining an interferogram associated with the incident beam passing through a transmission mask and Fourier transforming the interferogram to provide a frequency domain interferogram. The method also includes selecting a subset of harmonics from the frequency domain interferogram, individually inverse Fourier transforming each of the subset of harmonics to provide a set of spatial domain harmonics, and extracting a phase profile from each of the set of spatial domain harmonics. The method further includes removing phase discontinuities in the phase profile, rotating the phase profile, and reconstructing a phase front of the wavefront of the incident beam.
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