System having a process chamber for workpieces
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United States of America Patent
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Aug 23, 2016
Grant Date -
May 7, 2015
app pub date -
Apr 26, 2013
filing date -
May 2, 2012
priority date (Note) -
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Abstract
The invention relates to an installation having a process chamber which comprises an inner space having a receiving region for workpieces. The process chamber has an opening for the supply or discharge of workpieces. The process chamber is constructed so as to have a device for the introduction of gaseous fluid into the inner space, which device has at least one nozzle or aperture for the production of a fluid stream curtain between the opening and the receiving region for workpieces. The process chamber has a device for supplying fresh air, with which device fresh air can be introduced into the receiving region at a side of the fluid stream curtain, which side faces away from the opening.
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