Vacuum pump
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United States of America Patent
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Aug 23, 2016
Grant Date -
Aug 29, 2013
app pub date -
Feb 14, 2013
filing date -
Feb 23, 2012
priority date (Note) -
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Abstract
The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.
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