Method of manufacturing mirror shells of a nested shells grazing incidence mirror
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United States of America Patent
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Aug 23, 2016
Grant Date -
Jun 26, 2014
app pub date -
Dec 16, 2013
filing date -
Dec 20, 2012
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Abstract
The present invention relates to a method of manufacturing mirror shells of a nested shells grazing incidence mirror, in particular for EUV radiation and/or X-rays. In the method a blank of a bulk material is provided and machined to form a mirror body of the shell. Mechanical structures are integrated and/or attached to the mirror body during and/or after the machining step. The mechanical structures are required for mounting and/or operating the mirror shells. After these steps the optical surface is formed on the mirror body by diamond turning. The proposed method allows the manufacturing of mirror shells of a nested shells grazing incidence mirror at low costs with high optical quality which may also be refurbished one or several times.
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