Scanning probe microscope and sample observation method using same
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United States of America Patent
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Aug 16, 2016
Grant Date -
Dec 31, 2015
app pub date -
Oct 28, 2013
filing date -
Jan 25, 2013
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Abstract
The purpose of the present invention is to increase the detection light amount of near-field light, which is generated in a liquid between a measurement probe and a sample-to-be-inspected, at the time of employing a near-field scanning microscope for measurement in a liquid, and to improve measurement reproducibility and the SN ratio of near-field light images. The present invention provides a scanning probe microscope comprising: a measurement probe that is relatively scanned over a sample-to-be-inspected; a laser beam irradiation system that irradiates the measurement probe with a laser beam; a sample cell that holds the sample-to-be-inspected and that transmits scattered light of near-field light generated between the measurement probe and the sample-to-be-inspected by the laser beam irradiation; and a detector that detects the scattered light that has passed through the sample cell.
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