Microbolometer array with improved performance

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United States of America Patent

PATENT NO 9417134
APP PUB NO 20140226021A1
SERIAL NO

14131298

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers (300) of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane (301) suspended above said supporting substrate, said membrane consisting of an element (305) for absorbing the incident radiation and a thermometric element (304) in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (311), a dielectric film (310), and a second metallic film (309), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band. The area of the microbolometer pixel covered by said membrane (301) is less than or equal to half of the total area of the microbolometer pixel.

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Patent Owner(s)

  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (CEA);COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES—CEA;OFFICE NATIONAL D'ETUDES ET DE RECHERCHES AEROPATIALES-ONERA;OFFICE NATHIONAL D'ETUDES ET DE RECHERCHES AEROSPATIALES—ONERA—CHEMIE DE LA HUNIERE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bouchon, Patrick Antony, FR 11 41
Collin, Stéphane Cachan, FR 6 38
Deschamps, Joël Marcoussis, FR 2 24
Haidar, Riad Paris, FR 12 58
Koechlin, Charlie Bourg la Reine, FR 1 24
Pardo, Fabrice Vitry sur Seine, FR 11 120
Pelouard, Jean-Luc Paris, FR 19 103
Yon, Jean-Jacques Sassenage, FR 36 247

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