Compact hazardous gas line distribution enabling system single point connections for multiple chambers
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 16, 2016
Issued Date -
N/A
app pub date -
Oct 6, 2014
filing date -
Oct 11, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A system and method for safely enabling the delivery of at least one gas line to at least one point of use in a facility by using a vacuum system and a gas delivery system wherein the gas delivery system is housed within the vacuum system is disclosed herein. An interior volume of a conduit containing therein at least one gas line is maintained at reduced pressure as one end of the gas line connects to a gas source and another end of the gas line connects to a point of use. By using a conduit to enclose the individual gas lines and using a single feed line for each gas, the embodiments disclosed herein reduce the number of individual gas lines that need to be run through a facility.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully