Apparatus for manufacturing a semiconductor device and method of manufacturing a semiconductor device

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United States of America Patent

PATENT NO 9415501
APP PUB NO 20150059159A1
SERIAL NO

14013971

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Abstract

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An apparatus for manufacturing a semiconductor device includes a holder for holding a carrier and a supporting base for receiving the holder comprising a recess for accommodating a plurality of balls mounted on a surface of the carrier. Furthermore, a method of manufacturing a semiconductor device includes providing a carrier, providing an apparatus comprising a supporting base including a recess, holding the carrier on the supporting base and accommodating a plurality of balls mounted on a surface of the carrier in the recess.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chin-Liang Kaohsiung, TW 101 714
Ho, Kuan-Lin Hsinchu, TW 60 346
Lin, Shih-Yen New Taipei, TW 51 290
Lin, Wei-Ting Taipei, TW 91 467
Liu, Yu-Chih Taipei, TW 46 397

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