Ultraviolet energy shield for non-volatile charge storage memory
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United States of America Patent
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Aug 2, 2016
Grant Date -
Dec 15, 2011
app pub date -
Jun 10, 2010
filing date -
Jun 10, 2010
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Abstract
An integrated circuit with non-volatile memory cells shielded from ultraviolet light by a shielding structure compatible with chemical-mechanical processing. The disclosed shielding structure includes a roof structure with sides; along each side are spaced-apart contact posts, each with a width on the order of the wavelength of ultraviolet light to be shielded, and spaced apart by a distance that is also on the order of the wavelength of ultraviolet light to be shielded. The contact posts may be provided in multiple rows, and extending to a diffused region or to a polysilicon ring or both. The multiple rows may be aligned with one another or staggered relative to one another.
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