Method and system for improving characteristic peak signals in analytical electron microscopy

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United States of America Patent

PATENT NO 9406496
APP PUB NO 20130240728A1
SERIAL NO

13681245

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Abstract

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A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSITAT DE BARCELONACENTRO DE PATENTES UB BALDIRI REIXAC 4 TORRE D BARCELONA 08028

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Albiol, Sonia Estrade Barcelona, ES 1 4
Cardona, Lluís Yedra Barcelona, ES 1 1
Corsellas, José Manuel Rebled Tarragona, ES 1 4
Kim, Steven Phoenix, US 194 7653
Martinez, Francisca Peiró Barcelona, ES 1 1
Nicolopoulos, Stavros Valencia, ES 4 55
Serra, Joaquin Portillo Barcelona, ES 1 4
Weiss, Jon Karl Tempe, US 4 20

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