Facility and method for treating substrate
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United States of America Patent
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Aug 2, 2016
Grant Date -
Jun 5, 2014
app pub date -
Nov 27, 2013
filing date -
Nov 30, 2012
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Abstract
Provided is a method of a substrate treatment. The method includes providing an operation module with substrates contained in a lot and performing an operation treatment thereon and performing a test treatment on the substrates completed with the operation treatment in a test module. The performing of the test treatment includes determining a substrate to be tested, which is provided to the test module, to allow the test treatment to be completed within an operation treatment time for the substrates in a unit lot.
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