Microelectromechanical transducer and test system
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United States of America Patent
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Aug 2, 2016
Grant Date -
Apr 25, 2013
app pub date -
Nov 26, 2012
filing date -
Jul 3, 2008
priority date (Note) -
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Abstract
A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.
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