Methods and apparatus for temperature control of devices and mechanical resonating structures
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United States of America Patent
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Jul 26, 2016
Grant Date -
Mar 6, 2014
app pub date -
Feb 27, 2013
filing date -
Jun 4, 2009
priority date (Note) -
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Abstract
Methods and apparatus for temperature control of devices and mechanical resonating structures are described. A mechanical resonating structure may include a heating element and a temperature sensor. The temperature sensor may sense the temperature of the mechanical resonating structure, and the heating element may be adjusted to provide a desired level of heating. Optionally, additional heating elements and/or temperature sensors may be included.
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