Polishing composition for edge roll-off improvement
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United States of America Patent
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Jul 26, 2016
Grant Date -
Nov 5, 2015
app pub date -
May 5, 2014
filing date -
May 5, 2014
priority date (Note) -
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Abstract
The invention provides a chemical-mechanical polishing composition including (a) an abrasive comprising wet-process silica particles, (b) a water-soluble polymer, (c) an oxidizing agent, (d) a chelating agent, (e) a pH-adjusting agent, and (f) an aqueous carrier, wherein the pH of the polishing composition is about 1 to about 7. The invention also provides a method of polishing a substrate, especially a nickel-phosphorus substrate, with the polishing composition.
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