Transient measurements of mass flow controllers
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United States of America Patent
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Jul 26, 2016
Grant Date -
May 31, 2012
app pub date -
Nov 29, 2011
filing date -
Nov 29, 2010
priority date (Note) -
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Abstract
An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.
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