Method and device for forming a plasma beam

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United States of America Patent

PATENT NO 9398678
APP PUB NO 20130300288A1
SERIAL NO

13825913

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Abstract

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The invention relates to a method and device for forming a plasma beam. According to the invention: the quality of the electroneutrality of the plasma beam (PB) is detected (in 12 and/or 13); and the alternating polarization potentials of the extraction and acceleration grid (4) are adjusted such that the plasma beam (PB) is at least approximately electrically neutral.

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Patent Owner(s)

Patent OwnerAddress
ARIANEGROUP SAS51-61 ROUTE DE VERNEUIL LES MUREAUX 78130

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aanesland, Ane Paris, FR 4 4
Chabert, Pascal Paris, FR 3 5
Irzyk, Michael Melun, FR 23 73
Mazouffre, Stéphane Orléans, FR 2 3

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