Multi-actuator design and control for a high-speed/large-range nanopositioning system
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United States of America Patent
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Jul 19, 2016
Grant Date -
May 21, 2015
app pub date -
Nov 19, 2014
filing date -
Nov 20, 2013
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Abstract
Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.
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