Semiconductor device and method for manufacturing the same

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United States of America Patent

PATENT NO 9396994
APP PUB NO 20160163588A1
SERIAL NO

14598080

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Abstract

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The present invention relates to a semiconductor device and a method for manufacturing the same. Disclosed is a semiconductor device including a substrate, a conductive line on the substrate, and a seed layer between the substrate and the conductive line, the seed layer including cobalt titanium nitride.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRY-ACADEMIC COOPERATION FOUNDATION YONSEI UNIVERSITY50 YONSEI-RO SEODAEMUN-GU SEOUL 03722

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Hyungjun Seoul, KR 145 1302
Kim, Soohyeon Uijeongbu-si, KR 15 6
Lee, Han-Bo-Ram Seoul, KR 7 8
Yoon, Jaehong Seoul, KR 5 6

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