Susceptor
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United States of America Patent
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Jul 19, 2016
Grant Date -
Dec 3, 2015
app pub date -
Jun 2, 2014
filing date -
Jun 2, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A susceptor, comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring; wherein the inner ring and the outer ring separate the holders from one another.
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