Vacuum treatment apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 19, 2016
Grant Date -
Mar 27, 2014
app pub date -
Dec 27, 2011
filing date -
Dec 29, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
To reduce pumping time of a vacuum treatment chamber served by a transport arrangement in a transport chamber the vacuum treatment chamber is split into a workpiece treatment compartment and a pumping compartment in mutual free flow communication and arranged opposite each other with respect to a movement path of the transport arrangement serving the vacuum treatment chamber. The pumping compartment allows a pumping port to have a flow cross-section area that is freely selectable independently from the geometry of the treatment compartment.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully