Anti-electrostatic substrate cassette
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United States of America Patent
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Jul 19, 2016
Grant Date -
Oct 9, 2014
app pub date -
Apr 7, 2014
filing date -
Apr 9, 2013
priority date (Note) -
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Abstract
The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.
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