Scanning probe microscope
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United States of America Patent
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Jul 19, 2016
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N/A
app pub date -
Jun 19, 2015
filing date -
Jun 19, 2015
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Abstract
A scanning probe microscopes including an imaging device (optical microscope) which images the cantilever, a device is provided which estimates the resonance frequency of the cantilever from the cantilever image imaged by the imaging device, as a result of which, even when information on the cantilever is unknown, the cantilever is actually excited to perform measurement of resonance frequency within a specified frequency range centered on the estimated resonance frequency, thereby enabling measurement of resonance frequency within an appropriate frequency range and making it possible to avoid obtaining an incorrect resonance frequency and to eliminate the waste of performing resonance frequency measurements while changing the frequency range settings in trial-and-error fashion.
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