Device for measuring coating thickness
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United States of America Patent
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Jul 19, 2016
Grant Date -
Feb 19, 2015
app pub date -
Jul 3, 2012
filing date -
Jan 24, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
Provided herein is a device for measuring a thickness of a dielectric layer on a base substrate. The device is provided with a cylindrical resonant cavity having a circular cylindrical wall and a plane wall on one end thereof, wherein the opposite end is open to be placed upon the dielectric layer on the substrate to form a wall of the resonant cavity on the opposite end; an antenna located within the resonant cavity and adapted to excite an electromagnetic field in the resonant cavity that is approximately zero in the dielectric layer; a reflection meter connected to the antenna and adapted to measure the resonant frequency of the resonant cavity; and a processor connected to the reflection meter. Also provided herein is a method for measuring a thickness of a dielectric layer on a base substrate having a curved surface.
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