Method for producing a dielectric layer on a component

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United States of America Patent

PATENT NO 9394163
APP PUB NO 20130126466A1
SERIAL NO

13639527

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Abstract

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A method for producing a dielectric layer on the surface of a component is described. In particular embodiments, a dielectric layer having a planar surface can be generated over a substrate topography having raised structures. In a trimming process, a component property, which depends on the thickness or the third topography of the dielectric layer, is adjusted.

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Patent Owner(s)

Patent OwnerAddress
SNAPTRACK INC5775 MOREHOUSE DRIVE SAN DIEGO CA 92121

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Binninger, Charles Munich, DE 7 4
Eggs, Christoph Rattenkirchen, DE 11 162
Fuerbacher, Bruno Ingolstadt, DE 1 0
Knauer, Ulrich Munich, DE 11 116
Maisch, Manfred Unterhaching, DE 1 0
Zottl, Helmut Munich, DE 3 1

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