Substrate transfer apparatus and method, and substrate processing apparatus
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United States of America Patent
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Jul 12, 2016
Grant Date -
Jul 16, 2015
app pub date -
Nov 25, 2014
filing date -
Jan 13, 2014
priority date (Note) -
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Abstract
Provided are a substrate transfer apparatus and method and a substrate processing apparatus. The substrate transfer apparatus includes: a body portion; an arm part coupled to the body portion, the arm part moving to allow the substrate to be transferred; a suction part provided with the arm portion, the suction part suctioning and fixing the substrate; and a control part controlling an operation of the substrate transfer apparatus, wherein the control part changes a suction point on the substrate to re-attempt suction when suction of the substrate by the suction part is unsuccessful.
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