Multiple probe actuation
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 12, 2016
Grant Date -
Aug 6, 2015
app pub date -
Aug 28, 2013
filing date -
Aug 31, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of actuating a plurality of probes. Each probe may be made of two or more materials with different thermal expansion coefficients which are arranged such that when the probe is illuminated by an actuation beam it deforms to move the probe relative to a sample. Energy is delivered to the probes by sequentially illuminating them with an actuation beam via an objective lens in a series of scan sequences. Two or more of the probes are illuminated by the actuation beam in each scan sequence and the actuation beam enters the objective lens at a different angle to an optical axis of the objective lens for each probe which is illuminated in a scan sequence. The actuation beam is controlled so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2013 Application Filing Year
- G01Q Class
- 89 Applications Filed
- 80 Patents Issued To-Date
- 89.89 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 12, 2028 |
