Substrate storing container

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9387960
APP PUB NO 20140138279A1
SERIAL NO

14131120

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU POLYMER CO LTD1-1-3 OTEMACHI CHIYODA-KU TOKYO 1000004 ?1000004
MIRAIAL CO LTD24-1 HIGASHI-IKEBUKURO 1-CHOME TOSHIMA-KU TOKYO 1700013 ?1700013

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Shuichi Tokyo, JP 28 268
Matsutori, Chiaki Kumamoto, JP 38 218
Nagashima, Tsuyoshi Tokyo, JP 26 121
Ohnuki, Kazumasa Saitama, JP 5 26
Oyama, Takaharu Tokyo, JP 12 75
Shida, Hiroyuki Saitama, JP 9 100
Yamagishi, Hiroki Saitama, JP 16 157

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