Semiconductor manufacturing equipment with trace elements for improved defect tracing and methods of manufacture
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 5, 2016
Grant Date -
Jul 10, 2014
app pub date -
Jan 7, 2013
filing date -
Jan 7, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A semiconductor manufacturing equipment comprising trace elements and method of manufacture are disclosed. The semiconductor manufacturing equipment includes one or more components, wherein at least one component is made from an alloy comprising one or more materials and one or more rare earth elements (REEs). The alloy comprises predetermined quantities of the respective REEs. The method for manufacturing a component includes forming an alloy comprising at least one material and one or more selected rare earth elements (REEs) and building the component with the alloy.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully