Workpiece characterization system
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United States of America Patent
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Jul 5, 2016
Grant Date -
Feb 2, 2012
app pub date -
Jun 22, 2011
filing date -
Jun 22, 2011
priority date (Note) -
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Abstract
A workpiece characterization system for obtaining simultaneous measurement of layer and photoluminescence properties of a workpiece. The workpiece characterization system includes an excitation light and an illumination light each impinging upon a surface of a workpiece whereby the workpiece emits photoluminescent light and encodes light from said illumination source with layer information. The excitation light and the illumination light are generated from a single light source. The light from the single light source is filtered to remove wavelengths of light that correlate to light wavelengths emitted from the workpiece as a result of excitation. Wavelengths that correlate to light reflected from the workpiece that may contain encoded information are not filtered.
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