Single crystal silicon pulling silica container and manufacturing method thereof
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United States of America Patent
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Jul 5, 2016
Grant Date -
Feb 27, 2014
app pub date -
Oct 2, 2012
filing date -
Dec 12, 2011
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Abstract
The present invention provides a single-crystal silicon pulling silica container including an outer layer made of opaque silica glass containing gaseous bubbles and an inner layer made of transparent silica glass that does not substantially contain the gaseous bubbles; the container also including: a bottom portion, a curved portion, and a straight body portion, wherein continuous grooves are formed on a surface of the inner layer from at least part of the bottom portion to at least part of the straight body portion through the curved portion. As a result, there are provided the single-crystal silicon pulling silica container that can reduce defects called voids or pinholes in the pulled single-crystal silicon and a method for manufacturing such a silica container.
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