Device for stripping a product substrate from a carrier substrate
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United States of America Patent
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Jul 5, 2016
Grant Date -
Mar 19, 2015
app pub date -
Nov 25, 2014
filing date -
Sep 1, 2009
priority date (Note) -
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Abstract
Device for stripping a product substrate from a carrier substrate connected to the product substrate by an interconnect layer by means of a flexible film that is mounted on a film frame and that comprises an adhesive layer for holding the product substrate in a bonding surface section of the film, the film being mounted on the film frame in an attachment section of the film that surrounds the bonding surface section, and the film comprising a stripping section that is located between the bonding surface section and the attachment section, the device having stripping means for effecting a stripping of the product substrate from the carrier substrate from a periphery of the product substrate.
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