Aligning and focusing an electron beam in an X-ray source

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United States of America Patent

PATENT NO 9380690
SERIAL NO

13884447

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A technique for indirectly measuring the degree of alignment of a beam in an electron-optical system including aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practiced in connection with an X-ray source which is operable to produce an X-ray target, further, a technique for determining and controlling a width of an electron-beam at its intersection point with the target.

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Patent Owner(s)

Patent OwnerAddress
EXCILLUM AB164 40 KISTA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hemberg, Oscar Kista, SE 23 521
Sundman, Björn Kista, SE 2 15
Tuohimaa, Tomi Kista, SE 22 106

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  • 3 Citation Count
  • H01J Class
  • 20.76 % this patent is cited more than
  • 9 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges50115342306323221212363401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +010020030040050060070080090010001100120013001400150016001700

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