Holding device for holding a patterned wafer

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United States of America Patent

PATENT NO 9378996
APP PUB NO 20140159321A1
SERIAL NO

14236942

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Abstract

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This invention relates to a mounting apparatus for mounting and supporting one structure side of a substrate, which structure side has structures thereon. The apparatus having a mounting element with a flat mounting surface for supporting the structures and a suction surface F2 which penetrates the mounting surface solely in an outer ring surface for effecting a fluid flow which produces suctions on the substrate.

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Patent Owner(s)

Patent OwnerAddress
EV GROUP E THALLNER GMBHAUSTRIA LENZING UPPER AUSTRIA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burgstaller, Daniel Neuhofen/Innkreis, AT 6 37
Thallner, Werner St. Florian, AT 1 0

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