Photoreflectance device

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United States of America Patent

PATENT NO 9377300
APP PUB NO 20150338212A1
SERIAL NO

14651414

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Abstract

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A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSITE D'AIX-MARSEILLE13007 MARSEILLE 7
NEXCISFRENCH RUSE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bermudez, Véronica Rousset, FR 1 1
Escoubas, Ludovic Marseilles, FR 6 12
Moreau, Antonin Rousset, FR 2 1
Simon, Jean-Jacques Peypin, FR 9 45

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