MEMS particle sorting actuator and method of manufacture
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United States of America Patent
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Jun 21, 2016
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Jul 29, 2013
filing date -
Jan 21, 2011
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Abstract
A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.
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