Importance

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Abstract

Movement from a carrying table to a support table can be prevented from becoming complicated and made simpler and positioning on the support table can be easily performed. Provision is made of cleaning tanks 40, 50 which hold and clean parts of a substrate case C inside a booth 10 in a separated state, provision is made of a support table 20 which supports the substrate case C in the booth 10, provision is made of a conveyance mechanism which conveys the parts of the substrate case C between the support table 20 and the cleaning tanks 40, 50, provision is made of a carrying table 13 on which the substrate case C is carried at the outside of an opening 11 of the booth 10, provision is made of a movement mechanism 30 which moves the substrate case C between the carrying table 13 and the support table 20, and the movement mechanism 30 carries the support table 20 and can be moved to the two positions of an advance position R1 where it advances to the carrying table 13 side and receives and delivers a substrate case C with the carrying table 13 and a retraction position R2 where it retracts inside the booth 10 and delivers and receives a substrate case C with the conveyance mechanism.

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First Claim