MEMS component for generating pressure pulses
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United States of America Patent
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Jun 14, 2016
Grant Date -
Jun 19, 2014
app pub date -
Dec 18, 2013
filing date -
Dec 18, 2012
priority date (Note) -
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Abstract
A MEMS component for generating pressure pulses is provided, its micromechanical structure including at least three function levels: a first function level in which at least one stationary trench structure is implemented, a second function level, which is implemented above the first function level and includes at least one triggerable displacement element as well as through-openings as pressure outlet openings, the displacement element protruding into the trench structure and being movable in parallel with the function levels, whereby positive and negative pressure pulses are generated, and a third function level, which is implemented above the second function level and includes at least one triggerable cover element for at least one part of the pressure outlet openings in the second function level.
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