Scan head and scan arm using the same

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United States of America Patent

PATENT NO 9368326
APP PUB NO 20140367587A1
SERIAL NO

13919651

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head comprises a case, a shaft assembly, an ESC, a first driving mechanism and a second driving mechanism. The case has a normal center line. The shaft assembly passes through a first side of the case and has a twist axis, a first pivot point fixed relative to the case and a first end located outside the case. The ESC is fastened on the first end and capable of holding a work piece. The first driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to tilt relative to the normal center line. The second driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to rotate about the twist axis.

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Patent Owner(s)

Patent OwnerAddress
ADVANCED ION BEAM TECHNOLOGY INC5F NO 18 CREATION ROAD 1 SCIENCE PARK HSIN-CHU 300

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
McRay, Richard F Penn Valley, US 10 64

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